Details

The Bruker DektakXT is a high-precision stylus profilometer designed for accurate surface characterization across a wide range of materials and applications. It utilizes an advanced, low-force stylus scanning technology to measure step height, surface roughness, film thickness, and texture with exceptional repeatability and resolution. The DektakXT features an intuitive user interface, automated measurement routines, and advanced data analysis tools, enabling users to quickly obtain reliable 2D and 3D surface profiles. It supports a wide range of sample sizes and is compatible with multiple environments, making it versatile for semiconductor, thin-film, optics, MEMS, and materials science applications.

 

Model and Make

 Bruker DektakXT Profiler (profilometer)

Specifications

Key Features:

 

  • 3D Surface Imaging
  • Force Sensor
  • Noise and Speed Optimization
  • Data Acquisition & Analysis Software
  • Large Scan Length / Sampling
  • High Vertical Resolution & Range
  • Stylus-Based (Contact) Profilometry
Applications:

 

  • Surface Roughness Measurement
  • Step-Height and Thickness Characterization
  • Thin-Film Stress Analysis (Wafer Warpage / Curvature)
  • 3D Surface Mapping
  • Process Development & QA/QC in Semiconductor and Thin-Film Industries
  • Microfluidics and MEMS / Nanodevices
  • General Research / Material Science