Scanning Electron Microscope (Merlin Compact) With EDS

High resolution Field Emission Gun scanning electron microscope (FEG-SEM), (Model: Merlin Compact, Make: Zeiss, Germany) is available at ARCI, Chennai. The instrument has a best resolution of 0.8 nm with accelerating voltage variable from 0.02 to 30 keV. The FEG source is of thermionic emission type. The SEM is equipped with Secondary electron detector, In-lens detector, Back scattered Electron detector and EDS detector (EDAX, USA) for compositional analysis. The sample stage is a 5 axis euccentric stage with a tilt angle ranging from -3 to 70 0. The Gemini I column enables high resolution and high probe current making it more suitable for analytical applications.